Vibration Energy Harvesting with Pzt Thin Film Micro Device
نویسندگان
چکیده
A micro power generator for harvesting vibration energy by means of a piezoelectric laminated cantilever with inertial mass was designed, fabricated, and characterized. The device was micro machined from a silicon-on-insulator structure coated with a 2μm thick piezoelectric PZT thin film. Interdigitated electrodes (IDE) were applied to achieve higher voltages. A piezoelectric coupling constant k of 5% was derived from resonance/antiresonance curves. A voltage of 1.6 V, and an output power of 1.4 μW were measured at 2g acceleration and 870 Hz with a cantilever having a 0.8x0.4 mm large active area using the device close to antiresonance.
منابع مشابه
Micro-fabricated flexible PZT cantilever using d33 mode for energy harvesting
This paper presents a micro-fabricated flexible and curled PZT [Pb(Zr0.52Ti0.48)O3] cantilever using d33 piezoelectric mode for vibration based energy harvesting applications. The proposed cantilever based energy harvester consists of polyimide, PZT thin film, and inter-digitated IrOx electrodes. The flexible cantilever was formed using bulk-micromachining on a silicon wafer to integrate it wit...
متن کاملPiezoelectric Micro Power Generator for Energy Harvesting
A thin film lead zirconate titanate Pb(Zr,Ti)O3 (PZT), power generating device is developed. It is designed to resonate at specific vibrational frequencies from an ambient, vibrational energy source, thereby creating electrical energy via the piezoelectric effect. The energy harvesting device uses the piezoelectric d33 mode and is fabricated with three mask steps. Our cantilever device was desi...
متن کاملA PZT Based Capacitor for Direct Solar Energy Harvesting and Storing
In this paper, we present a Solar Energy harvesting and storing system. The solar energy is converted to electric charge by photosensitizing film and the charge generated is stored between the upper membrane and lower membrane of a capacitor. A PZT material based capacitor is used to retain the charge. The proposed system not only harvest energy from solar sources but also stores the charge bot...
متن کاملEffects of corner frequency on bandwidth and resonance amplitude in designing PZT thin-film actuators
In the last decade, lead zirconate titanate oxide (PZT) thin-film actuators have received increasing attention because of their high frequency bandwidth, large actuation strength, fast response, and small size. The PZT film thickness is usually less than several microns as opposed to hundreds of microns for bulk PZT patches that are commercially available. As a result, PZT thin-film actuators p...
متن کاملMEMS Pressure Sensor With Two Thin Film Piezoelectric Read-Out
We propose the structure to have only two pares of PZT thin films on the basis of [11]. This causes the structure to become simpler and easier to fabricate. And except its first vibration mode that is also the base mode, the other modes have no effect on the acceleration measurement. So it can be a better choice for the measurement of acceleration and it can have a huge potential as a micro-sen...
متن کامل